Silicon photonic beam steering module with backside coupling elements towards dense heterogeneous integration with drive electronics
نویسندگان
چکیده
Solid state beam steering devices are key elements in low cost, robust, and three-dimensional imaging systems. Here, we present a silicon photonic device based upon an 8 × grating coupler focal plane array approach fed by thermo-optic Mach–Zehnder switching tree. In this device, transmission of light from the couplers is made through backside chip using topside mirrors allowing for both high-efficiency out-coupling direct flip-chip integration drive electronics, providing path to scale denser arrays with large numbers points future. A −13.8 dB fiber-to-fiber was achieved our preliminary test around 1523 nm chip.
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ژورنال
عنوان ژورنال: APL photonics
سال: 2021
ISSN: ['2378-0967']
DOI: https://doi.org/10.1063/5.0065210